The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
Filter element: patented, sintered nickel membrane; housing: electropolished F20 stainless steel
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm
Downstream cleanliness volatiles : Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)