The patented nickel filter membrane of these inline gas filters offers superior corrosion resistance and excellent compatibility with inert and reactive gases. Not recommended for use with CO, O₃ and low-level hydride dopant gases.
- Superior particulate filtration for ultrapure gas system filtration
- Housing assembly eliminates outgassing by minimising weld area
- Eliminates outgassing, improves corrosion resistance and provides excellent chemical compatibility
Filter element: patented, sintered nickel membrane; housing: electropolished VAR 316L stainless steel.
Applications: ultrapure gas lines, high temperature and dynamic pressure applications, new fab construction, inert and reactive gases.
Downstream cleanliness: <0,03 particles/liter (<1 particle/0,028 m³) >0,01 μm.