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Inline gas filters, Wafergard® II F Mini XL

Dodávateľ: Entegris
Wafergard®
ENTEWG2F02JJ2EA 0 EUR
ENTEWG2F02JJ2 ENTEWG2F32PS1 ENTEWG2F02RR2 ENTEWG2F02RR4 ENTEWG2F02PS1 ENTEWG2F02JJ4
Inline gas filters, Wafergard® II F Mini XL
Filtry Filtry na plyny
Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.

  • Superior particulate filtration for ultrapure gas system filtration
  • Low pressure drop reduces the risk of condensation in low vapour pressure gases
  • Cleanroom manufactured, welded and tested
  • PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished 316L stainless steel.

Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, valve manifold boxes.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.
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