This 3-way valve (patent-pending) has an all-PFA valve body and high purity fluoropolymer wetted components providing a noncontaminating fluid stream and chemically compatible construction. Compliant to SEMI Standard F57-0301, the specification for polymer components used in ultrapure water and liquid chemical distribution systems.
- Significantly reduces footprint, saving valuable equipment space
- Optional integral safety lock out can lock the valve in the open or closed position
- Stand-alone mounting base enables you to easily install and remove the valve without tools
- Actuator design ensures reliable, long-term port-to-port seal without excessive loads
- Accommodates industry standard port connections including Flaretek®, Flaretek® 'SpaceSaver', FlareLock® II, PureBond® or FNPT