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Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series

Dodávateľ: Entegris
ENTEHA200-0005EA 0 EUR
ENTEHA200-0005 ENTEE21080100069F2 ENTEHA200-0063 ENTEE99-101-61C02 ENTEHA200-0002 ENTEE99-113N-69F02 ENTEE99-211N-69F02 ENTEE210801000PCPP ENTEE99-111N-69F02 ENTEE99-101-69F02 ENTEE99-101-0603
Wafer Storage Boxes for 150 mm Wafer Handling, E 99, E 210 and HA 200 Series
Manipulace s wafery Uchovávací boxy na wafery
E 99 Series

  • E 99 series storage boxes are the industry standard, offering maximum stacking density for space limited stockers and work in process racks
  • Automation compatible
  • Flat bottom, stackable
  • Single carrier capacity
  • Accommodates select 25-capacity wafer carriers, excluding wide-flange carriers
  • Migration path compatible with STAT-PRO® 100 material E 99 series storage boxes
  • Overall dimensions: 285×272×241 mm

E 210 Series
E 210 series storage boxes provide automation compatibility with wide-flange carriers and allow convenient manual handling. They incorporate features to minimize particle generation due to wafer chatter and carrier movement.
Automation compatible
Seven degree wafer tilt minimizes wafer chatter
Balanced for easy manual handling, stackable
Track notch registration
Single carrier capacity
Accommodates all 25 and 26 capacity wafer carriers and wide outboard flange carriers
Overall dimensions: 302×272×292 mm

HA 200 Series
HA 200 series storage boxes are the highest performance 200 mm storage boxes, providing superior automated and manual handling. They also incorporate features to minimize particle generation due to wafer chatter and carrier movement.
Automation compatible
Five degree wafer tilt minimizes wafer chatter
Single carrier capacity
Accommodates select 25-capacity carriers, excluding wide-flange carriers
Overall dimensions: 276×272×248 mm
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